期刊
MATERIALS LETTERS
卷 148, 期 -, 页码 22-25出版社
ELSEVIER SCIENCE BV
DOI: 10.1016/j.matlet.2015.02.016
关键词
Polyimide; Nanocrystalline materials; High dielectric constant; Thin film
Polyimide thin film has a low dielectric constant of 3.2. In this paper, we fabricated polyimide/ZrO2-nanocrystals hybrid thin films with a high dielectric constant of 6.1. The polyimide/ZrO2-nanocrystals hybrid thin films were formed by a spin-coating and a sintering process. The organic/inorganic hybrid thin films were characterized by X-ray powder diffraction, transmission electron microscopy, scanning electron microscopy, and LCR meter. Our experimental results confirmed that ZrO2 nanocrystals were well dispersed and embedded in the hybrid thin films. Compared with pristine polyimide thin film, the dielectric constant of polyimide/ZrO2-nanocrystal hybrid thin film significantly increased due to the incorporation of inorganic component. (C) 2015 Elsevier B.V. All rights reserved.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据