期刊
IEEE TRANSACTIONS ON MAGNETICS
卷 55, 期 3, 页码 -出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TMAG.2018.2867912
关键词
Ion implantation; magneto-crystalline anisotropy; self-assembly (SA); torque magnetometry
资金
- MOE AcRF [RG163/15]
- NRF-IIP [NRF2015-IIP003-001]
The effects of ion implantation through a mask on the structural and magnetic properties of FePt-C films were investigated. The mask pattern was fabricated using self-assembly of di-block copolymers. For implantation, high- (40 keV for N-14(+) and 100 keV for Ar-40(+)) and low- (7.5 keV for N-14(+) and 4.5 keV for Ar-40(+)) energy N-14(+) and Ar-40(+) ions were used to modify the structural and magnetic properties of these films. The X-ray diffraction and transport of ions in matter simulations were performed for understanding the structural changes due to the ion implantations. These results revealed the conversion of face-centered tetragonal phase to face-centered cubic (FCC) phase for Ar-40(+) ion implantations and increase in inter-planar spacing of FCC FePt (111) planes for N-14(+) ion implantations. Magnetic properties were then probed by using a vibrating sample magnetometer (VSM), torque magnetometer, and magnetic force microscopy (MFM). The results from VSM and torque magnetometer showed a change in anisotropy from out-of-plane to in-plane directions for all the implantation cases except for low-energy Ar-40(+) ion implantations. The MFM images also showed an absence of stripe domains confirming the above-mentioned effects.
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