期刊
IEEE TRANSACTIONS ON MAGNETICS
卷 48, 期 11, 页码 2907-2909出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TMAG.2012.2203295
关键词
Electrodepositon; film; permalloy; soft magnetic material
资金
- Grants-in-Aid for Scientific Research [24656212] Funding Source: KAKEN
Electrodeposited Fe-Ni films are widely used in device applications. However, there is a growing awareness of the toxicity of the plating bath containing boric acid. In order to avoid boric acid in the deposition process, we have employed a citric acid based bath for electrodeposition of Fe-Ni films and investigated the effect of the acid content in the bath on the structural and magnetic properties of the deposited films. It is found that the Fe content of the film depends largely on the acid concentration and low coercivity values of less than 30 A/m are realized when the Fe content of the film is around 22 at.%. This magnetic softness is attainable in a wide film thickness range between 20 and 120 mu m. Our process exhibits a relatively high cathode efficiency of above 55%. Furthermore, a high deposition rate of 170 mu m/h is obtained without sacrificing the magnetic softness of the film by increasing the current density during the deposition. From these results, we conclude that the citric acid based bath is an environmentally friendlier plating bath ideal for mass-production of magnetically soft Fe-Ni films.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据