期刊
IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT
卷 62, 期 6, 页码 1859-1864出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TIM.2013.2253913
关键词
Epitaxial graphene; gas sensor; graphene fabrication; measurement techniques; sensitivity measurement
资金
- EMRP MACPoll
- EURAMET
- European Union
Epitaxial 4H-SiC graphene films for use in ambient gas sensing are fabricated and tested. The sensitivity response to nitrogen dioxide is optimized by varying both operation temperatures and humidity. A relative resistance change response of -45% is obtained upon application of elevated temperatures and a gas mixture containing NO2 at a concentration of 10 parts per billion (10 ppb). The sensitivity response increased linearly with NO2 concentration, reaching -60% at a concentration of 250 ppb, followed by saturation at 1 part per million (ppm) level.
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