期刊
IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS
卷 58, 期 10, 页码 4830-4836出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TIE.2011.2114317
关键词
Beam steering; magnetically driven antenna; RF antenna; silicon grid; stress barrier pattern; vertical monolithic microwave integrated circuit (MMIC) integration
资金
- National Research Foundation of Korea [과C6B1618] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
This paper presents a single antenna platform steered by an external magnetic field where a monolithic microwave integrated circuit (MMIC) and capacitors are vertically integrated. Unique process skills are successfully optimized to implement a newly proposed microelectromechanical systems antenna. A silicon grid is patterned on the processing wafer to prevent the destruction of the antenna by benzocyclobutene delamination due to the stress applied to the wafers. Moreover, the stress barrier patterns are designed to increase the fabrication yield by protecting the structure failure during the back-side silicon release step. All the electrical elements, such as the MMIC, capacitors, patch antenna, and signal lines, are integrated on a single silicon chip; thus, the fabricated antenna system has smaller size and higher productivity than the conventional ones. The vertically integrated MMIC particularly results in a uniform gain at entire steering angles and reduced signal losses. The fabricated antenna is driven by a magnetic field externally applied with copper coils, and the antenna beam patterns are obtained with various tilting angles. The scanning angles are -14 degrees, 0 degrees, and +18 degrees in the H-plane and -18 degrees, -12 degrees, 0 degrees, +12 degrees, and +16 degrees in the E-plane, and the center frequency of the fabricated antenna is 59.8 GHz which is close to the designed resonance frequency of 60 GHz.
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