期刊
IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS
卷 57, 期 3, 页码 1120-1126出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TIE.2009.2036645
关键词
Dynamic profilometry; microelectromechanical systems (MEMS); resonant mode; stroboscopic interferometry
In this paper, an innovative method of automatic resonant-mode detection employing nonconventional stroboscopic interferometry is developed for nanoscale dynamic characterization of microstructures. Considering that a tested microstructure having an individual vibrating excitation source cannot be analyzed directly by the traditional stroboscopic method, an optical microscopy based on new stroboscopic interferometry was established to achieve resonant-mode detection and full-field vibratory out-of-plane surface profilometry of microstructures. To verify the effectiveness of the developed methodology, a crossbridge microbeam was measured to analyze the resonant vibratory modes and full-field dynamic-mode characterization. The experimental results confirm that the dynamic behavior of the microstructures can be accurately characterized with satisfactory mode-detection accuracy and surface profilometry.
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