期刊
IEEE TRANSACTIONS ON ELECTRON DEVICES
卷 65, 期 9, 页码 3725-3731出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TED.2018.2857468
关键词
GaN; gate dielectric; interface; metal-oxide-semiconductor (MOS)-high-electron-mobility transistor (HEMT)
资金
- Indian Space Research Organization
- Department of Science and Technology
- Impacting Research Innovation and Technology
We have demonstrated the potential use of thermally grown TiO2 and Al2O3 oxides as gate dielectrics for GaN-based high-electron-mobility-transistors. TiO2 and Al(2)O(3 )are found to provide negative and positive band offsets with AIGaN, respectively. A significant performance improvement on various device characteristics provides evidence for its potential use. The oxides are formed by a combination of predeposition of a thin film and followed by oxidation in pure O-2 environment. The formation and thickness of the oxides are confirmed through the X-ray photoelectron spectroscopy and the transmission electron microscopy. The performance improvement for TiO2- and Al2O3-based oxide gates have been identified in terms of a ideality factor and a reduction in the gate leakage current in comparison with that of control devices. This is further augmented by an increase in the n(s) x mu product. The ON/OFF current ratio and turn-on voltage increase by 2-3 orders of magnitude and 0.3-0.6, respectively, for the Schottky diodes. The negative shift on the capacitance-voltage characteristics is also found to be minimal, indicating higher gate coupling with thermally grown oxides.
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