期刊
IEEE TRANSACTIONS ON ELECTRON DEVICES
卷 57, 期 1, 页码 312-320出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TED.2009.2035533
关键词
Conductive atomic force microscopy (AFM); phase-change (PC) material; probe; programmable; reconfigurable; via
资金
- MISCIC Center at Carnegie Mellon
- Defense Advanced Research Projects Agency (DARPA) [HR0011-06-1-0047]
- Focus Center Research Program (FCRP)-Center on Functional Engineered Nano Architectonics
We present the realization of a novel three-terminal electronic switch using phase-change (PC) chalcogenide material. This device subdivides a single PC switch into a parallel array of three-terminal subvias which are addressed with atomic-force-microscopy cantilever probes. This subdivision reduces the required switching current to acceptable levels. Vias of Ge(50)Sb(50) are demonstrated in this switch topology and are switched between high-and low-resistance states. The vias show an OFF/ON resistance ratio of approximately 100x, which can be applied in radio-frequency switching applications. This dynamic range is 10x less than that observed in sheet films of this material, with the main loss being a reduction in resistivity between the sheet-film OFF-state and the device OFF-state. The device OFF-state resistivity is similar in the as-fabricated state and the reamorphized state.
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