期刊
IEEE SENSORS JOURNAL
卷 13, 期 2, 页码 601-609出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JSEN.2012.2223667
关键词
Flow sensor; lab-on-a-chip; multilayer soft lithography; polydimethylsiloxane (PDMS) microcantilever.
In this paper, a simple practical method is presented to fabricate a high aspect ratio horizontal polydimethylsiloxane (PDMS) microcantilever-based flow sensor integrated into a microfluidic device. A multilayer soft lithography process is developed to fabricate a thin PDMS layer involving the PDMS microcantilever and the microfluidics network. A three-layer fabrication technique is explored for the integration of the microflow meter. The upper and lower PDMS layers are bonded to the thin layer to release the microcantilever for free deflection. A 3-D finite element analysis is carried out to simulate fluid-structure interaction and estimate cantilever deflection under various flow conditions. The dynamic range of flow rates that is detectable using the flow sensor is assessed by both simulation and experimental methods and compared. Limited by the accuracy of the 1.76-mu m resolution of the image acquisition method, the present setup allows for flow rates as low as 35 mu L/min to be detected. This is equal to 0.8-mu N resolution in equivalent force at the tip. This flow meter can be integrated into any type of microfluidic-based lab-on-a-chip in which flow measurement is crucial, such as flow cytometry and particle separation applications.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据