Design of Micromachined Vibratory Gyroscope With Two Degree-of-Freedom Drive-Mode and Sense-Mode

In this paper, a novel micromachined vibratory gyroscope is proposed, where a two degree-of-freedom (2-DOF) architecture with two masses and three springs is utilized in both drive-mode and sense-mode. The 2-DOF dynamic structure provides the inherently robustness of both modes against structural and environmental variations. The proposed gyroscope demonstrates drive-mode 3-dB bandwidth of 190 Hz and sense-mode 3-dB bandwidth of 300 Hz at the operational frequency 5.0 kHz. The simulation results confirmed that the resonant frequency and bandwidth of the drive-mode are highly matched with those of sense-mode in the region of 4.90-5.09 kHz. So the gyroscope can be operated robustly in the region of 4.90-5.09 kHz. The proposed device can also be started quickly and suppress the pulse noise.