期刊
IEEE SENSORS JOURNAL
卷 11, 期 5, 页码 1162-1168出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JSEN.2010.2083651
关键词
MEMS; offset compensation; thermal flow sensors
资金
- Fondazione Cassa di Risparmio di Pisa, Pisa, Italy
A new offset compensation approach for integrated thermal flow meters is described. The method is based on micro-machined differential flow sensing structures with the heater split into two identical and symmetrical sections. The power unbalance between the two heaters is used to compensate the intrinsic sensor offset. The effectiveness of the approach is proven by means of experiments performed on micro flow meters fabricated by postprocessing chips produced with a commercial microelectronic process. The tests were devoted to demonstrate the robustness of the offset compensation with respect to variation of both the gas temperature and type.
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