期刊
IEEE SENSORS JOURNAL
卷 9, 期 1-2, 页码 169-175出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JSEN.2008.2011069
关键词
Fluidics; oxygen; porphyrin; ruthenium; silicone
资金
- National Science Foundation [ECS-0644679]
- National Institute of Health [EB006611-01]
A new class of optical oxygen sensor that can he photopatternable by traditional UV lithography is presented. They are fabricated using photopatternable spin-on silicone (polydimethylsiloxane, PDMS) with oxygen sensitive luminescent dyes. It has a good adhesion property and can be applied on glass or on photopolymer (SU-8) without any additional surface treatments. The optimum mixture composition for patternable oxygen sensitive membranes is investigated and its optical properties are characterized. Proof-of-concepts for two applications, intensity-based oxygen sensing with SU-8 based structure and self-calibration fluidic oxygen sensor, are described. These photopatternable optical membranes will find many applications wherever small patterns of oxygen sensitive membranes are required.
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