期刊
IEEE SENSORS JOURNAL
卷 8, 期 5-6, 页码 457-464出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JSEN.2008.918204
关键词
integrated optics; optical waveguide components; transducers
Refractive index sensors using self-forming microchannels embedded in borophosphosilicate glass and monolithically integrated with silica waveguides are presented. Fabricated devices presented include solid-core and liquid-core directional couplers, liquid-core modal interferometers, Mach-Zehnder interferometers, segmented waveguides, and microchannel grating devices. Sensitivities of these devices are calculated and compared with each other and to other well-known devices. Experimental characterizations show that the performance of fabricated devices agrees well with calculations.
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