期刊
IEEE SENSORS JOURNAL
卷 8, 期 9-10, 页码 1603-1611出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JSEN.2008.929068
关键词
Bragg grating; integrated optics; optical sensors; silicon photonics; silicon-on-insulator (SOI)
资金
- Italian Ministry of University and Research [II04C01CDM]
A submicrometer integrated optical sensor based on Bragg gratings in silicon-on-insulator technology is theoretically proposed in this paper. The grating analysis is performed using a mixed numerical approach based on the finite-element method and coupled mode theory. The possibility to use third-order instead of first-order grating is discussed and performances compared, thus overcoming fabrication problems associated to submicrometer scale features. A detection limit of approximately 10(-4) refractive index unit has been calculated for a 173-mu m-long grating. Strategies to further improve this value have been discussed too. Finally, fabrication tolerances influence on optimized gratings has been investigated.
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