期刊
IEEE PHOTONICS TECHNOLOGY LETTERS
卷 26, 期 20, 页码 2070-2073出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/LPT.2014.2347055
关键词
Fiber optics sensor; Fabry-Perot; optical microelectromechanical devices; spectrum analysis
资金
- National Instrumentation Program of China [2013YQ030915]
- National Basic Research Program of China [2010CB327802]
- National Natural Science Foundation of China [61227011, 11004150, 61108070]
- Tianjin Science and Technology Support Key Project [11ZCKFGX01900]
- Tianjin Natural Science Foundation [13JCYBJC162000]
- Science and Technology Key Project, Chinese Ministry of Education [313038]
- Shenzhen Science and Technology Research Project [JCYJ20120831153904083]
We demonstrated a simple and batch-producible fiber-optic sensor based on hybrid Fabry-Perot (FP) configuration for simultaneous pressure and temperature sensing. The proposed sensor head chips are batch fabricated by double-sided anodic bonding of a through-holes-array-structured glass wafer and two silicon wafers. The silicon-glass-silicon sandwich bonding structure constructs two serially connected low-finesse FP cavities naturally. The first cavity (FP1) is a silicon cavity and utilizes the refractive indices temperature dependence of silicon to achieve temperature sensing. The second cavity (FP2) is a vacuum cavity and employs a thin silicon diaphragm as a pressure sensing element. The reflection spectra exhibit hybrid interference fringes with different frequencies produced by silicon and vacuum cavity, and the temperature and pressure are simultaneously measured. Experiment results demonstrate that the pressure sensitivity of FP2 is 12.82 nm/kPa with a high linear pressure response over the range of 10-250 kPa, and the temperature sensitivity of FP1 is 142.02 nm/degrees C under the range of -20 degrees C-70 degrees C.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据