期刊
IEEE PHOTONICS TECHNOLOGY LETTERS
卷 25, 期 7, 页码 675-677出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/LPT.2013.2248354
关键词
Microelectromechanical systems; Si photonics; waveguide coupler; waveguide switch
资金
- SCOPE
Design and fabrication of a variable-gap waveguide coupler switch with a nano latch mechanism are reported for on-chip waveguide circuits in Si photonics. The proposed switch consists of a coupler of two freestanding 400-nm-wide 260-nm-thick Si waveguides, three 30-mu m-wide 40-mu m-long comb-drive actuators, and a nanolatch mechanism. The nanolatch mechanism consists of four hook-shaped latches for maintaining a switch-on state at a coupler gap of around 100 nm. The switching and latching characteristics are investigated. The port isolation under the latch-on condition is found to be 17 dB. Due to the capacitive operation of the actuators and the nanolatch mechanism, power consumption of the switch is minimized.
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