期刊
IEEE PHOTONICS TECHNOLOGY LETTERS
卷 24, 期 17, 页码 1472-1474出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/LPT.2012.2206110
关键词
Chemical-mechanical polishing (CMP); high-quality factor; resonant-cavity light-emitting diode (RCLED)
资金
- National Natural Science Foundation of China [10974165, 91023048, 61106044]
- Doctoral Program Foundation of Institutions of Higher Education of China [20110121110029]
High-quality factor (Q > 1700) GaN-based blue resonant-cavity light-emitting diodes (RCLEDs) incorporating an InGaN/GaN multiquantum well active region, two high-reflectivity dielectric-distributed Bragg reflectors, and a thin indium tin oxide (ITO) layer are fabricated by a two-step substrate transfer technique. Electroluminescence measurements showed a narrow linewidth of 0.26 nm at the wavelength of 450.6 nm by precisely placing the ITO layer at the node position of the electric field, corresponding to a high Q-value of 1720. Further, adopting a chemical-mechanical polishing (CMP) technique to polish the GaN surface after the removal of sapphire substrate, an even higher Q-value of 2170 was obtained. This improvement was attributed to the exclusion of the defect-rich buffer layer and the achievement of a smooth surface with a root mean square roughness below 1 nm. The integrated electroluminescence intensity was enhanced by 40% as compared with the RCLEDs without CMP at a current density of 8 kA/cm(2).
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