4.5 Article

Fiber-Based White-Light Interferometry for Nanoscale Distance Measurement and Control

期刊

IEEE PHOTONICS TECHNOLOGY LETTERS
卷 24, 期 23, 页码 2136-2138

出版社

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/LPT.2012.2223206

关键词

Distance control; optical path length (OPL); piezo-stage; white-light interferometry (WLI)

资金

  1. National Science Foundation [ECCS-0644488]

向作者/读者索取更多资源

We present a fiber-based white-light interferometry system capable of nanoscale distance measurement and control. Our prototype contains two cleaved single mode fibers tightly clamped together. Using a supercontinuum white-light source, we can achieve distance control with a standard deviation of <4 nm. This method is potentially suitable for applications that require noncontact measurements or that involve highly deformable structures.

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