期刊
IEEE PHOTONICS TECHNOLOGY LETTERS
卷 24, 期 23, 页码 2136-2138出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/LPT.2012.2223206
关键词
Distance control; optical path length (OPL); piezo-stage; white-light interferometry (WLI)
资金
- National Science Foundation [ECCS-0644488]
We present a fiber-based white-light interferometry system capable of nanoscale distance measurement and control. Our prototype contains two cleaved single mode fibers tightly clamped together. Using a supercontinuum white-light source, we can achieve distance control with a standard deviation of <4 nm. This method is potentially suitable for applications that require noncontact measurements or that involve highly deformable structures.
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