期刊
IEEE PHOTONICS TECHNOLOGY LETTERS
卷 23, 期 13, 页码 842-844出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/LPT.2011.2136430
关键词
Cascaded; nanowire; ring; Si; suspended; Vernier
资金
- Zhejiang Provincial Natural Science Foundation [R1080193]
- National Science Foundation of China [61077040]
A cascaded-ring optical sensor with Vernier effect is demonstrated experimentally by using Si nanowires. The Vernier effect helps to obtain ultrahigh sensitivity. In order to enhance the sensitivity further, a suspended Si nanowire is used for the sensing ring by removing the SiO(2) insulator underneath with a wet-etching process. The measurement result shows that the sensitivity Delta lambda/Delta n(a) of the demonstrated cascaded-ring optical sensor is up to 4.6 x 10(5) nm/RIU experimentally. The detection limit for the index change is about 4.8 x 10(-6).
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