期刊
IEEE MICROWAVE AND WIRELESS COMPONENTS LETTERS
卷 19, 期 5, 页码 299-301出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/LMWC.2009.2017595
关键词
Charge injection; dielectric films; dielectric materials; humidity; microelectromechanical devices; microwave devices; switches
资金
- US Defense Advanced Research Projects Agency [HR0011-06-1-0046]
A novel technique is used to distinguish the charging of the surface from that of the bulk of the dielectrics of different types of RF MEMS capacitive switches under different electric fields and humidity levels. In general, bulk charging dominates in dry air, while surface charging increases linearly with increasing humidity. Under comparable electric fields and humidity levels, switches made of silicon dioxide are less susceptible to surface charging than switches made of silicon nitride. These quantitative results not only underscore the importance of packaging the switches in a dry ambient atmosphere, but also validate the novel technique for evaluating the effectiveness of dielectric preparation and packaging.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据