期刊
IEEE JOURNAL OF QUANTUM ELECTRONICS
卷 47, 期 2, 页码 213-222出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JQE.2010.2077273
关键词
Germanium-tin alloys; infrared detectors; integrated optoelectronics; p-i-n; photodiodes; photovoltaic cell materials; semiconductor epitaxial materials; ultrahigh vacuum chemical vapor deposition
资金
- Air Force Office of Scientific Research, Multi-disciplinary University Research Initiative [FA9550-06-01-0442]
- Department of Energy [DE-FG36-08GO18003]
- Interconnect Focus Center-Semiconductor Research Corporation/Defense Advanced Research Projects Agency Focus Center [674.015]
Ge/Si heterostructure diodes based on n(++)Si(100)/i-Ge/p-Ge and p(++)Si(100)/i-Ge/n-Ge stacks and intrinsic region thickness of similar to 350 and similar to 900 nm, respectively, were fabricated using a specially developed synthesis protocol that allows unprecedented control of film microstructure, morphology, and purity at complementary metal-oxide-semiconductor compatible conditions. From a growth and doping perspective, a main advantage of our inherently low-temperature (390 degrees C) soft-chemistry approach is that all high-energy processing steps are circumvented. Current-voltage measurements of circular mesas (60-250 mu m in diameter) show dark current densities as low as 6 x 10(-3) A/cm(2) at -1 V bias, which is clearly improved over devices fabricated under low thermal budgets using traditional Ge deposition techniques. Spectral photocurrent measurements indicate external quantum efficiencies between 30 and 60% of the maximum theoretical value at zero bias, and approaching full collection efficiency at high reverse biases. The above Ge devices are compared to analogous low-temperature-grown (350 degrees C) Ge0.98Sn0.02 diodes. The latter display much higher dark currents but also higher collection efficiencies close to 70% at zero bias. Moreover, the quantum efficiency of these Ge0.98Sn0.02 diodes remains strong at wavelengths longer than 1550 nm out to 1750 nm due to the reduced band gap of the alloy relative to Ge.
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