Charge Transport and Degradation in HfO2 and HfOx Dielectrics

We combine experiments and simulations to investigate leakage current and breakdown (BD) in stoichiometric and sub-stoichiometric hafnium oxides. Using charge-transport simulations based on phonon-assisted carrier tunneling between trap sites, we demonstrate that higher currents generally observed in HfOx are due to a higher density of the as-grown oxygen vacancy defects assisting the charge transport. Reduction of the dielectric BD field (E-BD) in HfOx is explained by the lower zero-field activation energy (E-A,E- G) of the defect generation process, as extracted from time-dependent dielectric BD experiments.