相关参考文献
注意:仅列出部分参考文献,下载原文获取全部文献信息。Advanced CMOS-MEMS Resonator Platform
Cheng-Syun Li et al.
IEEE ELECTRON DEVICE LETTERS (2012)
System-level circuit simulation of nonlinearity in micromechanical resonators
Haoshen Zhu et al.
SENSORS AND ACTUATORS A-PHYSICAL (2012)
Differential internal dielectric transduction of a Lame-mode resonator
M. Ziaei-Moayyed et al.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2010)
Nonlinearities in a high-Q SOI Lame-mode bulk resonator
L. C. Shao et al.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2009)
Low loss HF band SOI wine glass bulk mode capacitive square-plate resonator
Joshua E-Y Lee et al.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2009)
5.4-MHz single-crystal silicon wine glass mode disk resonator with quality factor of 2 million
J. E. -Y. Lee et al.
SENSORS AND ACTUATORS A-PHYSICAL (2009)
The nonlinearity cancellation phenomenon in micromechanical resonators
L. C. Shao et al.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2008)
Optimal drive condition for nonlinearity reduction in electrostatic microresonators
Manu Agarwal et al.
APPLIED PHYSICS LETTERS (2006)
Square-extensional mode single-crystal silicon micromechanical resonator for low-phase-noise oscillator applications
V Kaajakari et al.
IEEE ELECTRON DEVICE LETTERS (2004)
Nonlinear limits for single-crystal silicon microresonators
V Kaajakari et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2004)
A study of the nonlinear response of a resonant microbeam to an electric actuation
MI Younis et al.
NONLINEAR DYNAMICS (2003)