期刊
IEEE ELECTRON DEVICE LETTERS
卷 33, 期 10, 页码 1492-1494出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/LED.2012.2210021
关键词
MEMS; micromechanical resonator; nonlinearity; single-crystal silicon (SCS)
资金
- City University of Hong Kong [7008088]
The spring hardening effect is reported here for the first time in a single-crystal-silicon bulk mode resonator. Reversing nonlinear behaviors (changing from spring softening to hardening) has been observed in fabricated silicon-on-insulator square-plate resonators of identical dimensions but aligned against different crystal orientations. This orientation-dependent reversal in the nonlinearity is explained using a dynamic model which incorporates a nonlinear strain-stress relation. The frequency response of the devices (with different dimensions) under various driving conditions can be closely predicted using the model.
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