期刊
IEEE ELECTRON DEVICE LETTERS
卷 32, 期 1, 页码 30-32出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/LED.2010.2089493
关键词
AlGaN/GaN/AlGaN; breakdown voltage; double-heterostructure FETs (DHFETs); Hall measurement; local Si substrate removal; MOCVD
资金
- European Space Agency [20713/07/NL/SF]
In this letter, we present a local substrate removal technology (under the source-to-drain region), reminiscent of through-silicon vias and report on the highest ever achieved breakdown voltage (V-BD) of AlGaN/GaN/AlGaN double-heterostructure FETs on a Si (111) substrate with only 2-mu m-thick AlGaN buffer. Before local Si removal, V-BD saturates at similar to 700 V at a gate-drain distance (L-GD) >= 8 mu m. However, after etching away the substrate locally, we measure a record V-BD of 2200 V for the devices with L-GD = 20 mu m. Moreover, from Hall measurements, we conclude that the local substrate removal integration approach has no impact on the 2-D electron gas channel properties.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据