期刊
IEEE ELECTRON DEVICE LETTERS
卷 31, 期 8, 页码 857-859出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/LED.2010.2049978
关键词
Chemical analysis; dielectric materials; electrical breakdown; MOS capacitors
资金
- Korean Ministry of Education, Science and Technology [R17-2008-043-01001-0]
- National Research Foundation of Korea [2008-0060619] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
Recently, SiO(2) grown at low temperatures has been highlighted for a range of applications. In this letter, SiO(2) films were deposited at 280 degrees C by plasma-enhanced atomic layer deposition (ALD) using bis-diethylamino-silane and O(2) plasma. The electrical conduction mechanisms of a 38-nm-thick SiO(2) film were found to be ohmic and Fowler-Nordheim tunneling in the low-and high-voltage ranges, respectively. The electrical breakdown field of the silicon oxide films was measured at similar to 10 MV/cm. The excellent breakdown field was well explained by the fact that ALD SiO(2) has very low carbon content (< 0.5%) and does not have any oxygen deficiency and nonbridging oxygen. Compared to wet SiO(2), the increase in etch rates was attributed to the existence of strained bonds.
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