Improvement of Resistive Switching Properties in ZrO2-Based ReRAM With Implanted Ti Ions

In this letter, the resistive switching properties of a ZrO2-based memory film with implanted Ti ions are investigated. The testing results demonstrate that doping Ti in ZrO2 can remove the electroforming process and reduce the variations of switching parameters such as Set voltage and resistance in OFF state. Furthermore, the Ti-doped ZrO2 resistive switching memory also exhibits high device yield (nearly 100%), low operating voltage, fast speed, large on/off ratio (> 10(4)), and long retention time (> 10(7) s). The formation and rupture of conducting filaments are suggested to be responsible for the resistive switching phenomenon. The doped Ti impurities can improve the formation of conducting filaments and switching behaviors.