期刊
IEEE ELECTRON DEVICE LETTERS
卷 30, 期 1, 页码 14-17出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/LED.2008.2008665
关键词
Flexible electronics; large-area sensor arrays; MEMS; photoablation; stretchable interconnects
Stretchable interconnects are fabricated on polymer substrates using metal patterns both as functional interconnect layers and as in situ masks for excimer laser photoablation. Single-layer and multilayer interconnects of various designs (rectilinear and meandering) have been fabricated, and certain meandering interconnect designs can be stretched up to 50% uniaxially while maintaining good electrical conductivity and structural integrity. This approach eliminates masks and microfabrication processing steps as compared to traditional fabrication approaches. Furthermore, this technology is scalable for large-area sensor arrays and electronic circuits, adaptable for a variety of materials and interconnects designs, and compatible with MEMS-based capacitive sensor technology.
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