Transformer plasma generator as plasma-chemical reactor

An atmospheric-pressure transformer plasma generator with a power of up to 50 kW is developed and manufactured. The thermophysical and electrophysical characteristics are studied of a discharge of up to 20 kW at atmospheric pressure of an argon-hydrogen mixture and current frequency of 100 kHz. The example of silicon tetrachloride is used for demonstrating the possibility of performing various reducing plasmachemical reactions which yield high-purity reaction products. The example of monosilane is used to demonstrate the possibility of preparing nanopowders of substances and their compounds.