Journal
ACS NANO
Volume 9, Issue 6, Pages 6548-6554Publisher
AMER CHEMICAL SOC
DOI: 10.1021/acsnano.5b02511
Keywords
molybdenum ditelluride; phase transition; phase engineering; chemical vapor deposition; tellurization
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Funding
- BK21-Plus through Ministry of Education, Korea
- KIST Institutional Program
- [IBS-R011-D1]
- Ministry of Science, ICT & Future Planning, Republic of Korea [IBS-R011-D1-2015-A00, 2Z04490] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
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We report the synthesis of centimeter-scale, uniform 1T'- and 2H-MoTe2 thin films via the tellurization of Mo thin films. 1T'-MoTe2 was initially grown and converted gradually to 2H-MoTe2 over a prolonged growth time under a Te atmosphere. Maintaining excessive Te was essential for obtaining the stable stoichionnetric 2H-MoTe2 phase. Further annealing under a lower partial pressure of Te at the same temperature, followed by a rapid quenching, led to the reverse phase transition from 2H-MoTe2 to 1T'-MoTe2. The orientation of the 2H-MoTe2 film was determined by the tellurization rate. Slow tellurization was the key for obtaining a highly oriented 2H-MoTe2 film over the entire area, while fast tellurization led to a 2H-MoTe2 film with a randomly oriented c-axis.
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