3.8 Article

Synthesis of SiC Thin Films on Si Substrates by Ion-Beam Sputtering

Related references

Note: Only part of the references are listed.
Article Chemistry, Inorganic & Nuclear

A theoretical study of lithium absorption in amorphous and crystalline silicon

Z. I. Popov et al.

JOURNAL OF STRUCTURAL CHEMISTRY (2011)

Article Physics, Condensed Matter

Luminescence and Structure of Nanosized Inclusions Formed in SiO2 Layers under Double Implantation of Silicon and Carbon Ions

D. I. Tetelbaum et al.

JOURNAL OF SURFACE INVESTIGATION-X-RAY SYNCHROTRON AND NEUTRON TECHNIQUES (2009)

Article Physics, Applied

Superhard nanocrystalline silicon carbide films

F Liao et al.

APPLIED PHYSICS LETTERS (2005)

Article Materials Science, Multidisciplinary

High-dose carbon implantations into silicon: fundamental studies for new technological tricks

JKN Lindner

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING (2003)

Article Materials Science, Coatings & Films

C-SiC-Si gradient films formed on silicon by ion beam assisted deposition at room temperature

K Volz et al.

SURFACE & COATINGS TECHNOLOGY (2000)