4.0 Article

CVD of Pure Copper Films from Amidinate Precursor

Related references

Note: Only part of the references are listed.
Article Chemistry, Physical

Uptake of Copper Acetamidinate ALD Precursors on Nickel Surfaces

Qiang Ma et al.

CHEMISTRY OF MATERIALS (2010)

Article Engineering, Electrical & Electronic

Evaluation of a novel unfluorinated copper precursor for chemical vapor deposition

Haizheng Song et al.

MICROELECTRONIC ENGINEERING (2010)

Article Chemistry, Inorganic & Nuclear

Copper(II) Oligomeric Derivatives for Deposition of Copper Thin Films

Muhammad Shahid et al.

EUROPEAN JOURNAL OF INORGANIC CHEMISTRY (2009)

Article Electrochemistry

CVD of Conducting Ultrathin Copper Films

Naoufal Bahlawane et al.

JOURNAL OF THE ELECTROCHEMICAL SOCIETY (2009)

Article Chemistry, Inorganic & Nuclear

Novel valuable fluorine free copper(I) precursors for copper chemical vapor deposition

Phong Dinh Tran et al.

POLYHEDRON (2009)

Article Materials Science, Multidisciplinary

Effects of amino-terminated self-assembled monolayers on nucleation and growth of chemical vapor-deposited copper films

Zheng-Zheng Liu et al.

THIN SOLID FILMS (2008)

Article Chemistry, Inorganic & Nuclear

Copper(I) Carboxylates of Type [('' BU3P)(m)CuO2CR] (m=1, 2, 3) - Synthesis, Properties, and their Use as CVD Precursors

Alexander Jakob et al.

ZEITSCHRIFT FUR ANORGANISCHE UND ALLGEMEINE CHEMIE (2008)

Article Electrochemistry

Copper films deposited by hot-wire CVD and direct liquid injection of CupraSelect

Giorgos Papadimitropoulos et al.

CHEMICAL VAPOR DEPOSITION (2007)

Article Materials Science, Coatings & Films

Thermal behaviour of CpCuPEt3 in gas phase and Cu thin films processing

E. Senocq et al.

SURFACE & COATINGS TECHNOLOGY (2007)

Review Engineering, Electrical & Electronic

On the use of alloying elements for Cu interconnect applications

K. Barmak et al.

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B (2006)

Article Physics, Atomic, Molecular & Chemical

Chemical vapor deposition mechanism of copper films on silicon substrates

Song Wu et al.

CHINESE JOURNAL OF CHEMICAL PHYSICS (2006)

Article Electrochemistry

Atomic layer deposition of ultrathin copper metal films from a liquid copper(I) amidinate precursor

Zhengwen Li et al.

JOURNAL OF THE ELECTROCHEMICAL SOCIETY (2006)

Article Nanoscience & Nanotechnology

Investigation of sputter-deposited Al-2at.%Cu layers by means of the tomographic atom probe (TAP)

PP Choi et al.

SCRIPTA MATERIALIA (2005)

Article Chemistry, Physical

Atomic layer deposition of transition metals

BS Lim et al.

NATURE MATERIALS (2003)

Article Chemistry, Inorganic & Nuclear

Synthesis and characterization of volatile, thermally stable, reactive transition metal amidinates

BS Lim et al.

INORGANIC CHEMISTRY (2003)

Article Chemistry, Physical

Microstructure and properties of VO2 thin films deposited by MOCVD from vanadyl acetylacetonate

MB Sahana et al.

JOURNAL OF MATERIALS CHEMISTRY (2002)