Journal
DIAMOND AND RELATED MATERIALS
Volume 23, Issue -, Pages 1-4Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.diamond.2011.12.043
Keywords
HiPIMS; HPPMS; Carbon ionization; Tetrahedral amorphous carbon; Diamond-like carbon
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Funding
- Swedish Research Council (VR) [621-2008-3222, 623-2009-7348]
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A strategy that facilitates a substantial increase of carbon ionization in magnetron sputtering discharges is presented in this work. The strategy is based on increasing the electron temperature in a high power impulse magnetron sputtering discharge by using Ne as the sputtering gas. This allows for the generation of an energetic C+ ion population and a substantial increase in the C+ ion flux as compared to a conventional Ar-HiPIMS process. A direct consequence of the ionization enhancement is demonstrated by an increase in the mass density of the grown films up to 2.8 g/cm(3); the density values achieved are substantially higher than those obtained from conventional magnetron sputtering methods. (C) 2012 Elsevier B.V. All rights reserved.
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