Journal
DIAMOND AND RELATED MATERIALS
Volume 19, Issue 4, Pages 342-349Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.diamond.2010.01.008
Keywords
RF PECVD; Ti-doped DLC; Ultralow friction; Load; Relative humidity
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Funding
- National Natural Science Foundation of China [50705093, 50575217, 50421502]
- National 973 Project [2007 CB607601]
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Ti-doped hydrogenated DLC films were prepared by radio frequency discharged CH4/Ar plasma and co-sputtering of titanium targets. It was found that, after the incorporation of Ti together with O, the DLC films exhibit superior friction performance, including ultralow and steady friction coefficients (about 0.008) in ambient air, little sensitivity to relative humidity and independence of counterpart material and test atmosphere. A combined effect of the inherent physical properties with the friction-induced structural transformation, and the presence of a transfer film, may explain the excellent lubrication performance of the Ti-DLC films. (C) 2010 Elsevier B.V. All rights reserved.
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