Journal
DIAMOND AND RELATED MATERIALS
Volume 18, Issue 10, Pages 1247-1252Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.diamond.2009.04.009
Keywords
CVD diamond films; Hydrogen; Grain size dependence; ERDA; XPS; RS
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Funding
- Key Project of Chinese Academy of Sciences Knowledge Innovation Program
- National Natural Science Foundation of China [10375085]
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In this investigation, diamond thin films with grain size ranging from 50 nm to I pm deposited using hot filament chemical vapor deposition (HFCVD) have been analyzed by elastic recoil detection analysis (ERDA) for determining hydrogen concentration. Hydrogen concentration in diamond thin films increases with decreasing grain size. Raman spectroscopy and X-ray photoelectron spectroscopy (XPS) results showed that part of this hydrogen is bonded to carbon forming C-H bonding. Raman spectra also indicated the increase of non diamond phase with the decrease in crystallite size. Incorporation of hydrogen in the samples and increase of hydrogen content in nanocrystalline sample are discussed. Large separation between filament and substrate used for the synthesis of nanocrystalline film helped to understand the large incorporation of hydrogen in nanocrystalline diamond films during growth. The study addresses the hydrogen trapping in different samples and higher hydrogen concentration in nanocrystallites by considering the synthesis conditions, growth mechanisms for different grain sized diamond films and from the quality of CVD diamond films. (C) 2009 Elsevier B.V. All rights reserved.
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