Journal
CURRENT NANOSCIENCE
Volume 15, Issue 4, Pages 328-353Publisher
BENTHAM SCIENCE PUBL LTD
DOI: 10.2174/1573413714666180813110942
Keywords
Micro-patterning; CNT forest; VACNT Array; CNT; MWCNT; mu EDM; laser
Categories
Funding
- MOHE [PRGS16-008-0039]
Ask authors/readers for more resources
Vertically Aligned Carbon Nanotubes array which is also sometimes labeled as carbon nanotubes forests has many applications in several engineering fields for its remarkable mechanical, electrical, optical, and thermal properties. The Vertically Aligned Carbon Nanotubes array is often employed in developing microdevices such as pressure sensor, angle sensor, switches, etc. To successfully integrate carbon nanotubes forest to the micro-electro-mechanical systems based devices, micropatterning of the carbon nanotubes forest is required. There are several methods available to realize micropatterning of Vertically Aligned Carbon Nanotubes array, from in-situ patterning during the growth process to post-patterning process. Each has its advantages and disadvantages. This paper will discuss elaborately different patterning processes of the carbon nanotubes forest and their different characteristics.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available