Journal
CURRENT APPLIED PHYSICS
Volume 14, Issue 8, Pages 1045-1050Publisher
ELSEVIER SCIENCE BV
DOI: 10.1016/j.cap.2014.05.002
Keywords
Graphene; Chemical vapor deposition; Transfer; Organic residue; Au-assisted transfer
Funding
- Basic Science Research Program through the National Research Foundation of Korea (NRF) - Ministry of Education [2010-0020207, 2012R1A1A2007211]
- National Research Foundation of Korea [2012R1A1A2007211] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
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In this study, we tried to reduce the organic contamination of graphene. This organic contamination most likely occurs during the graphene transfer and lithography steps, which in turn degrades the quality of the graphene. Inorganic Au film was applied for Au-assisted transfer instead of the conventional thin poly(methyl methacrylate), and a new fabrication process using the Au-film for the transfer and masking layer was designed in order to minimize the contamination of graphene from organic residues. As a result, we demonstrated that the overall qualities of the transferred graphene film and graphene transistors have been highly improved. These improvements include an enhancement of mobility, and a decrease of defects, unintentional doping, contact resistance, and sheet resistance. (C) 2014 Elsevier B.V. All rights reserved.
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