Journal
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
Volume 15, Issue 10, Pages 8187-8190Publisher
AMER SCIENTIFIC PUBLISHERS
DOI: 10.1166/jnn.2015.11290
Keywords
MIC Method; LiCoO2 Thin Film; Magnetron Sputtering; Microbattery
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Funding
- Science Research Program through the National Research Foundation of Korea (NRF) - Ministry of Education, Science and Technology [2012-R1A1A2008821, 2012-R1A1A2006742]
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LiCoO2 thin films were fabricated using the metal-induced crystallization (MIC) method. The effect of MIC on the microstructural and electrochemical properties of the films was investigated. The crystal structures and surface morphologies of the deposited films were investigated by X-ray diffraction (XRD), Raman spectroscopy, and field emission electron microscopy (FE-SEM). Charge discharge tests were carried out in order to examine the electrochemical properties of the films. The LiCoO2 thin film fabricated using MIC exhibited better microstructural and electrochemical properties at a lower annealing temperature.
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