Ni-catalysed WO3 nanostructures grown by electron beam rapid thermal annealing for NO2 gas sensing

Ni-catalysed WO3 (Ni-WO3) nanowires and nanosheets were grown on Si (100) substrates using electron beam evaporation followed by electron beam-assisted rapid thermal annealing process. Gas-sensing measurements were performed for various concentrations of NO2 in dry air at a temperature range of 50-400 degrees C. Nanowires and nanosheets show optimum sensor response of 229 and 197 at operating temperatures of 200 and 250 degrees C, respectively, for 100 ppm of NO2 exposure. Nanowires demonstrated a rapid response time of 66 s, but a slow recovery time of 204 s owing to poor rate of desorption of the adsorbed NO2 gas molecules from the internal porous structure of nanowires. In contrast, the recovery time for nanosheet was 126 s due to higher desorption rate of the adhered NO2 molecules associated with low surface area and less porous structure of nanosheet. The gas-sensing mechanism of WO3 nanostructure is discussed briefly.