Journal
COORDINATION CHEMISTRY REVIEWS
Volume 255, Issue 11-12, Pages 1293-1318Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.ccr.2010.12.018
Keywords
Gallium oxide; Indium oxide; Single-source precursors
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Funding
- EPSRC [EP/F035675/1]
- EPSRC [EP/F035675/1] Funding Source: UKRI
- Engineering and Physical Sciences Research Council [EP/F035675/1] Funding Source: researchfish
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Gallium and indium oxide thin films have received much attention in recent years for their wide range of applications. This review summarises the literature concerning single-source precursors and the methods employed to deposit gallium and indium oxide thin films using these compounds. An update of the literature outlining compounds which are potential single-source precursors to these materials is also included. (C) 2011 Elsevier B.V. All rights reserved.
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