4.5 Article

An Integrated Flexible Harvester Coupled Triboelectric and Piezoelectric Mechanisms Using PDMS/MWCNT and PVDF

Journal

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 24, Issue 3, Pages 513-515

Publisher

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JMEMS.2015.2404037

Keywords

PVDF thick film; vibration; coupled mechanisms; PDMS/MWCNT; energy harvester

Funding

  1. 973 Program [2013CB329401]
  2. Innovation Program of Shanghai Municipal Education Commission [14ZZ019]
  3. Shanghai Pujiang Talent Program Sponsorship [13PJ1405100]
  4. National Natural Science Foundation of China [51035005, 61076107, 61204119]

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This paper describes the design, fabrication, and characterization of an integrated flexible energy harvester with triboelectric and piezoelectric hybrid mechanisms. The double-side tribological layers are polydimethylsiloxane (PDMS) and PDMS/multiwall carbon nanotube (MWCNT) carbon nanotube, respectively, which works at triboelectric mechanism. The Polyvinylidene Fluoride (PVDF) film with double-side Al electrodes is bonded with PDMS layer to form the functional layer of piezoelectric harvester. The dimension of the fabricated prototype is 15 mm x 10 mm x 5 mm. The experiments at the varied frequencies from 1 to 5 Hz are conducted to characterize the performance of the harvester under the tapping force of 5 N. The output voltages from triboelectric and piezoelectric harvester are 30 and 6.5 V at 5 Hz, respectively. The maximum output power from triboelectric one is similar to 3.4 mu W under the matched resistance of 15 M Omega. While the maximum power from piezoelectric one was similar to 0.12 mu W at 1 M Omega.

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