4.2 Article

In-chip direct laser writing of a centimeter-scale acoustic micromixer

Journal

Publisher

SPIE-SOC PHOTO-OPTICAL INSTRUMENTATION ENGINEERS
DOI: 10.1117/1.JMM.14.2.023503

Keywords

microfabrication; direct laser writing; microfluidics; ultrasonic streaming; confocal laser scanning microscopy

Funding

  1. Dutch Ministry of Economic Affairs
  2. research theme sensoring

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A centimeter-scale micromixer was fabricated by two-photon polymerization inside a closed microchannel using direct laser writing. The structure consists of a repeating pattern of 20 mu m x 20 mu m x 155 mu m acrylate pillars and extends over 1.2 cm. Using external ultrasonic actuation, the micropillars locally induce streaming with flow speeds of 30 mu m s(-1). The fabrication method allows for large flexibility and more complex designs. (C) The Authors. Published by SPIE under a Creative Commons Attribution 3.0 Unported License.

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