Journal
CIRP ANNALS-MANUFACTURING TECHNOLOGY
Volume 63, Issue 1, Pages 329-332Publisher
ELSEVIER
DOI: 10.1016/j.cirp.2014.03.031
Keywords
Micromachining; Silicon carbide; Polycrystalline diamond (PCD) tool
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The production of extremely thick silicon carbide (SiC) has recently become possible with the advent of a specific chemical vapor deposition process. Ultra-precision machining of high-purity SiC has been performed by using a polycrystalline diamond (PCD) micromilling tool to investigate the machining characteristics. Results indicate that a high-quality surface (R-a = 1.7 nm) can be obtained when the removed chips are thin enough to achieve ductile mode machining. Micron-sized wells and groove structures with nanometer-scale surface roughness were successfully machined by using the PCD tool. In addition, a new electrochemically assisted surface reconditioning process has been proposed to remove the contaminant material adhered onto the PCD tool surfaces after prolonged machining. (C) 2014 CIRP.
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