Journal
CIRP ANNALS-MANUFACTURING TECHNOLOGY
Volume 59, Issue 1, Pages 351-354Publisher
TECHNISCHE RUNDSCHAU EDITION COLIBRI LTD
DOI: 10.1016/j.cirp.2010.03.115
Keywords
Finishing; Polishing; Micromachining
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A magnetic field-assisted finishing process has been studied for high-aspect-ratio ion-etched silicon curvilinear micropore structures, which have potential application as mirrors for satellite-borne X-ray telescopes. The micropore sidewalls act as X-ray focusing mirrors, and lead to reductions in the mass-to-effective-area ratio of 10-1000 times, compared to traditional X-ray telescopes. This paper describes the processing principle for the surface finishing of the sidewalls of micropore structures (10, 20 mu m and depth: 300 mu m (aspect ratio approximate to 15, 30)), and the feasibility of achieving roughness similar to 4 nm rms and improving the X-ray reflectivity of micropore sidewall surface are demonstrated. (C) 2010 CIRP.
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