TiO2 coating on metal and polymer substrates by nano-particle deposition system (NPDS)

TiO2 thin films have been widely used in corrosion protection, solar cells, self-cleaning surfaces, photocatalysis, capacitors, etc. In this research, TiO2 thin films were deposited on metal substrates (stainless steel, Cu alloy, Al alloy) and polymer substrates (PET, PMMA) by nano-particle deposition system (NPDS) at room temperature and low vacuum condition. Submicron size TiO2 powders were sprayed through the supersonic nozzle and deposited at high deposition rate without thermal damage on the substrates. Material properties such as hardness, modulus, chemical composition, adhesion and morphology were measured. The test results showed that the NPDS provides a good coating method of TiO2 material for applications requiring large surface areas. (C) 2008 CIRP.