4.3 Article

Fabrication and Properties of Microcapacitors with a One-nanometer-thick Single Ti0.87O2 Nanosheet

Journal

CHEMISTRY LETTERS
Volume 43, Issue 3, Pages 307-309

Publisher

CHEMICAL SOC JAPAN
DOI: 10.1246/cl.130925

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Funding

  1. JSPS through the NEXT
  2. CSTP [GR029]

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The dielectric and insulating properties of a single Ti0.87O2 nanosheet were investigated by fabricating an Au/single Ti0.87O2 nanosheet/Au planar microcapacitor structure. Capacitance and electric measurements of the nanosheet microcapacitor showed reproducibly good performance as a gate insulator: almost frequency-independent capacitance up to 1 MHz and extremely high electric field endurance of >= 20 MV cm(-1).

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