Journal
CHEMICAL VAPOR DEPOSITION
Volume 19, Issue 4-6, Pages 142-148Publisher
WILEY-V C H VERLAG GMBH
DOI: 10.1002/cvde.201207041
Keywords
Hybrids; Laminates; MALD; Ozone; Thin films
Funding
- Kookmin University in Korea
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In this study, we investigate 7-octenytrichlorosilane (7-OTS) multilayers and relevant organic-inorganic hybrid nano-laminates fabricated using ozone (O3) based molecular-atomic layer deposition (MALD). Highly concentrated O3 gas introduced into the MALD chamber converts alkene (CC) terminal groups of 7-OTS molecules into carboxylic (COOH) groups. Trimethyl-aluminum (TMA) is applied to form a linker to construct multilayers of the OTS molecules. Aluminum oxide (Al2O3) and zinc oxide (ZnO) are embedded between the organic layers to form an organic-inorganic hybrid nano-laminate structure. Fourier transform infrared spectroscopy (FTIR), water contact angle measurement, ellipsometry, and transmission electron microscopy (TEM) are used to elucidate the growth mechanism.
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