Organic-Inorganic Hybrid Nano-laminates Fabricated by Ozone-assisted Molecular-atomic Layer Deposition

In this study, we investigate 7-octenytrichlorosilane (7-OTS) multilayers and relevant organic-inorganic hybrid nano-laminates fabricated using ozone (O3) based molecular-atomic layer deposition (MALD). Highly concentrated O3 gas introduced into the MALD chamber converts alkene (CC) terminal groups of 7-OTS molecules into carboxylic (COOH) groups. Trimethyl-aluminum (TMA) is applied to form a linker to construct multilayers of the OTS molecules. Aluminum oxide (Al2O3) and zinc oxide (ZnO) are embedded between the organic layers to form an organic-inorganic hybrid nano-laminate structure. Fourier transform infrared spectroscopy (FTIR), water contact angle measurement, ellipsometry, and transmission electron microscopy (TEM) are used to elucidate the growth mechanism.