4.8 Review

Chloride-Based CVD Growth of Silicon Carbide for Electronic Applications

Journal

CHEMICAL REVIEWS
Volume 112, Issue 4, Pages 2434-2453

Publisher

AMER CHEMICAL SOC
DOI: 10.1021/cr200257z

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Funding

  1. Swedish Research Council
  2. Swedish Energy Agency
  3. Swedish Foundation for Strategic Research
  4. Office of Naval Research
  5. National Science Foundation

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