Journal
CHEMICAL COMMUNICATIONS
Volume 50, Issue 65, Pages 9176-9178Publisher
ROYAL SOC CHEMISTRY
DOI: 10.1039/c4cc04104f
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Funding
- European Research Council (ERC) under the European Community's Seventh Framework Programme [259312]
- Israeli National Nanotechnology Initiative (INNI, FTA project)
- European Research Council (ERC) [259312] Funding Source: European Research Council (ERC)
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Tailor-made metal oxide (MO) thin films with controlled compositions, electronic structures, and architectures are obtained via molecular layer deposition (MLD) and solution treatment. Step-wise formation of permeable hybrid films by MLD followed by chemical modification in solution benefits from the versatility of gas phase reactivity on surfaces while maintaining flexibility which is more common at the liquid phase.
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