Journal
SOLID STATE SCIENCES
Volume 2, Issue 2, Pages 257-278Publisher
ELSEVIER
DOI: 10.1016/S1293-2558(00)00119-9
Keywords
61.10.Kw X-ray reflectometry (surfaces, interfaces, films); 68.35.Ct interface structure and roughness; 68.55.Jk structure and morphology; thickness
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An overview is given of the theory and experimental implementation of grazing incidence specular reflectivity. Special attention is paid to the latest developments in data analysis methods. The overview is completed by a number of experimental studies showing the possibilities of grazing incidence reflectivity in thin him characterization. (C) 2000 Editions scientifiques et medicales Elsevier SAS. All rights reserved.
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